Clean Oven Class 100 — Enex

High-cleanliness oven for semiconductor and optical industries — Class 100 cleanliness, removes > 99.9 % of 0.1 μm particles, heat-resistant ultra-HEPA to 235 °C.

Request a quote Hotline +84 913 425 986 Chat on Zalo Download catalog PDF

Description & applications

High-cleanliness oven for semiconductor and optical industries — Class 100 cleanliness, removes > 99.9 % of 0.1 μm particles, heat-resistant ultra-HEPA to 235 °C.

Technical specifications

Chambers	2
Cleanliness	Class 100 (ISO 5)
Particle removal	> 99.9 % at 0.1 μm
Temperature	Lên đến 235 °C
Filter	Ultra HEPA, heat resistant
Cooling	Air cooling

Key features

• Class 100 cleanliness — required for wafer and optics fabrication
• Heat-resistant ultra HEPA up to 235 °C
• Profile: ATM → 100 °C → 175 °C → cooling with smooth control

Applicable standards

ISO 14644-1 Class 5

Applications in Vietnam

• Semiconductor wafer drying
• Optics / precision lens curing
• Cleanroom equipment bake-out

About the manufacturer — Enex Science

ENEX SCIENCE CO., LTD is a Korean environmental test chamber manufacturer founded in 2008, headquartered in Goyang-si, Gyeonggi-do. Enex products are KS / CE / UR certified and distributed in Vietnam by Setcom (authorized distributor). See all Enex products.

Technical documents

• Enex 2025 Company Profile (PDF, English)

Frequently Asked Questions

Can it be placed inside an existing cleanroom?

Yes — designed to sit in Class 1000 or better cleanroom without contaminating the surroundings.

Contact for consultation & quote

Setcom is the authorized Enex Science distributor in Vietnam. Our engineers will advise the right configuration, quote within 4 business hours, and support installation, calibration and maintenance.

Hotline: +84 913 425 986 · Email: info@setcom.com.vn

Need custom capacity, temperature range or standards? See our custom design.